Development of water immerse type ultrasound probe with PZT film deposited by hydrothermal method. 

It is well known that ultrasound is used in various fields like medical applications, non-destructive inspection and many other manufacturing processes. our purpose of study is to form PZT piezoelectric films with hydrothermal method and to develop ultrasound sensors with resonant frequency of a few MHz to a few hundreds MHz.

Proc IEEE International Ultrason Symp　Vol.2　pp.1300-1305