Papers

Basic information

Name Takashi Izumi
Belonging department Department of Acupuncture and Moxibustion,Faculty of Health Care
Occupation name Professor
researchmap researcher code
researchmap agency

Title

Estimation of the Depletion Layer Thickness in Silicon Nanowire-Based Biosensors from Attomolar-Level Biomolecular Detection (査読付)

Bibliography Type

Joint Author

Summary

SiNW biosensors have attracted a lot of attention due to their superior sensitivity. The dependence of biomolecule detection sensitivity on the nanowire width, number, and doping density has been investigated. In this study, we designed and fabricated SiNW biosensors with different widths by integrating a complementary metal-oxide-semiconductor process and electron beam lithography.

Magazine(name)

ACS Applied Materials & Interfaces

Date of Issue

202304